1.2.1 Dopped tunnel-oxide polysilicon 

The planned activities within this package aim to reduce cost and improve performance of TOPCon solar cells by:

• Enhance the doped tunnel-oxide polysilicon process, to achieve lower contact resistivity, reduced optical losses, improved passivation, stability and reliability.

• Extend the functionalities of doped polysilicon for junction-formation, hydrogenation and pattering capabilities towards novel device applications.